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  1. CMI - Center of MicroNanoTechnology

    The CMI is a complex of clean rooms and processing equipment for the training and scientific experimentation devoted to the users of microtechnologies.
    SEM3
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    MEMS1
    ICP1
    MEB1
    microelectronics1
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    oxidation1
    CVD1
    wafers1
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    wet etch1
    dry etch1

    cmi.epfl.ch - 2009-04-10

silicon2 glass3 valley3 laser3 coatings2 micro2 california5 jose2 nano2 nanotechnology2 lasek1 botox2 coating2 paint3 etch1 lasik2 mems1 dry etching1 plasma2 icp1 etching2 epoxy2 engrave1

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